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A Novel Three-Axial Magnetic-Piezoelectric MEMS AC Magnetic Field Sensor
We report a novel three-axial magnetic-piezoelectric microelectromechanical systems (MEMS) magnetic field sensor. The sensor mainly consists of two sensing elements. Each of the sensing elements consists of a magnetic Ni thick film, a Pt/Ti top electrode, a piezoelectric lead zirconate titanate (PZT...
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| 出版年: | Micromachines (Basel) |
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| 主要な著者: | , , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
MDPI
2019
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6843634/ https://ncbi.nlm.nih.gov/pubmed/31635155 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10100710 |
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