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Design and Application of MEMS-Based Hall Sensor Array for Magnetic Field Mapping
A magnetic field measurement system based on an array of Hall sensors is proposed. The sensors are fabricated using conventional microelectromechanical systems (MEMS) techniques and consist of a P-type silicon substrate, a silicon dioxide isolation layer, a phosphide-doped cross-shaped detection zon...
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| Publicado no: | Micromachines (Basel) |
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| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2021
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7998490/ https://ncbi.nlm.nih.gov/pubmed/33809131 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12030299 |
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