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A MEMS-based Benzene Gas Sensor with a Self-heating WO(3) Sensing Layer
In the study, a MEMS-based benzene gas sensor is presented, consisting of a quartz substrate, a thin-film WO(3) sensing layer, an integrated Pt micro-heater, and Pt interdigitated electrodes (IDEs). When benzene is present in the atmosphere, oxidation occurs on the heated WO(3) sensing layer. This c...
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| Hauptverfasser: | , , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
Molecular Diversity Preservation International (MDPI)
2009
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3348818/ https://ncbi.nlm.nih.gov/pubmed/22574052 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s90402895 |
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