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3 degree-of-freedom resonant scanner with full-circumferential range and large out-of-plane displacement
Microsystems-based scanning technologies can achieve deflection angles of several tens of degrees and translational displacements of a couple hundred microns. Emerging applications need performance with multi-fold greater torsional and translational motion. A compliant lever-based mechanism is intro...
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| Udgivet i: | Opt Express |
|---|---|
| Main Authors: | , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
Optical Society of America
2019
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6825615/ https://ncbi.nlm.nih.gov/pubmed/31163809 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1364/OE.27.016296 |
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