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A three-degree-of-freedom thin-film PZT-actuated microactuator with large out-of-plane displacement

A novel three degree-of-freedom microactuator based on thin-film lead-zirconate-titanate (PZT) is described with its detailed structural model. Its central rectangular-shaped mirror platform, also referred to as the stage, is actuated by four symmetric PZT bending legs such that each leg provides ve...

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Detalhes bibliográficos
Publicado no:J Micromech Microeng
Main Authors: Choi, Jongsoo, Qiu, Zhen, Rhee, Choong-Ho, Wang, Thomas, Oldham, Kenn
Formato: Artigo
Idioma:Inglês
Publicado em: 2014
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4262122/
https://ncbi.nlm.nih.gov/pubmed/25506131
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0960-1317/24/7/075017
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