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A three-degree-of-freedom thin-film PZT-actuated microactuator with large out-of-plane displacement
A novel three degree-of-freedom microactuator based on thin-film lead-zirconate-titanate (PZT) is described with its detailed structural model. Its central rectangular-shaped mirror platform, also referred to as the stage, is actuated by four symmetric PZT bending legs such that each leg provides ve...
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| Udgivet i: | J Micromech Microeng |
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| Main Authors: | , , , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
2014
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4262122/ https://ncbi.nlm.nih.gov/pubmed/25506131 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0960-1317/24/7/075017 |
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