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Multi-photon vertical cross-sectional imaging with a dynamically-balanced thin-film PZT z-axis microactuator
Use of a thin-film piezoelectric microactuator for axial scanning during multi-photon vertical cross-sectional imaging is described. The actuator uses thin-film lead-zirconate-titanate (PZT) to generate upward displacement of a central mirror platform, micro-machined from a silicon-on-insulator (SOI...
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| Vydáno v: | J Microelectromech Syst |
|---|---|
| Hlavní autoři: | , , , , |
| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
2017
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| Témata: | |
| On-line přístup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5790190/ https://ncbi.nlm.nih.gov/pubmed/29398884 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/JMEMS.2017.2701798 |
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