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A VCO-Based CMOS Readout Circuit for Capacitive MEMS Microphones
Microelectromechanical systems (MEMS) microphone sensors have significantly improved in the past years, while the readout electronic is mainly implemented using switched-capacitor technology. The development of new battery powered “always-on” applications increasingly requires a low power consumptio...
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| Publicat a: | Sensors (Basel) |
|---|---|
| Autors principals: | , , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI
2019
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6806232/ https://ncbi.nlm.nih.gov/pubmed/31554194 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19194126 |
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