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A Review of MEMS Capacitive Microphones

This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrica...

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Bibliografische gegevens
Gepubliceerd in:Micromachines (Basel)
Hoofdauteurs: Zawawi, Siti Aisyah, Hamzah, Azrul Azlan, Majlis, Burhanuddin Yeop, Mohd-Yasin, Faisal
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: MDPI 2020
Onderwerpen:
Online toegang:https://ncbi.nlm.nih.gov/pmc/articles/PMC7281444/
https://ncbi.nlm.nih.gov/pubmed/32397340
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11050484
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