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A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer
In this paper, we report a novel aluminum nitride (AlN) thin-film piezoelectric resonant accelerometer. Different from the ordinary MEMS (micro-electro-mechanical systems) resonant accelerometers, the entire structure of the accelerometer, including the mass and the springs, is excited to resonate i...
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| Publicat a: | Micromachines (Basel) |
|---|---|
| Autors principals: | , , , , , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI
2019
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6780656/ https://ncbi.nlm.nih.gov/pubmed/31489954 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10090589 |
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