Yang, J., Zhang, M., He, Y., Su, Y., Han, G., Si, C., . . . Wang, X. (2019). A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer. Micromachines (Basel).
Stile di citazione ChicagoYang, Jian, Meng Zhang, Yurong He, Yan Su, Guowei Han, Chaowei Si, Jin Ning, Fuhua Yang, e Xiaodong Wang. "A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer." Micromachines (Basel) 2019.
Citazione MLAYang, Jian, et al. "A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer." Micromachines (Basel) 2019.
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