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Subsurface imaging of flexible circuits via contact resonance atomic force microscopy

Subsurface imaging of Au circuit structures embedded in poly(methyl methacrylate) (PMMA) thin films with a cover thickness ranging from 52 to 653 nm was carried out by using contact resonance atomic force microscopy (CR-AFM). The mechanical difference of the embedded metal layer leads to an obvious...

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Shranjeno v:
Bibliografske podrobnosti
izdano v:Beilstein J Nanotechnol
Main Authors: Wang, Wenting, Ma, Chengfu, Chen, Yuhang, Zheng, Lei, Liu, Huarong, Chu, Jiaru
Format: Artigo
Jezik:Inglês
Izdano: Beilstein-Institut 2019
Teme:
Online dostop:https://ncbi.nlm.nih.gov/pmc/articles/PMC6693404/
https://ncbi.nlm.nih.gov/pubmed/31467825
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.10.159
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