A carregar...
A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process
This paper presents a micromachined micro-g capacitive accelerometer with a silicon-based spring-mass sensing element. The displacement changes of the proof mass are sensed by an area-variation-based capacitive displacement transducer that is formed by the matching electrodes on both the movable pro...
Na minha lista:
| Publicado no: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2019
|
| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6630974/ https://ncbi.nlm.nih.gov/pubmed/31181589 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10060380 |
| Tags: |
Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
|