A carregar...
PMMA-Based Wafer-Bonded Capacitive Micromachined Ultrasonic Transducer for Underwater Applications
This article presents a new wafer-bonding fabrication technique for Capacitive Micromachined Ultrasonic Transducers (CMUTs) using polymethyl methacrylate (PMMA). The PMMA-based single-mask and single-dry-etch step-bonding device is much simpler, and reduces process steps and cost as compared to othe...
Na minha lista:
| Publicado no: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2019
|
| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6562750/ https://ncbi.nlm.nih.gov/pubmed/31083578 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10050319 |
| Tags: |
Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
|