Cargando...
Large Area Nanohole Arrays for Sensing Fabricated by Interference Lithography
Several fabrication techniques are recently used to produce a nanopattern for sensing, as focused ion beam milling (FIB), e-beam lithography (EBL), nanoimprinting, and soft lithography. Here, interference lithography is explored for the fabrication of large area nanohole arrays in metal films as an...
Guardado en:
| Publicado en: | Sensors (Basel) |
|---|---|
| Autores principales: | , , |
| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
MDPI
2019
|
| Materias: | |
| Acceso en línea: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6539013/ https://ncbi.nlm.nih.gov/pubmed/31083502 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19092182 |
| Etiquetas: |
Agregar Etiqueta
Sin Etiquetas, Sea el primero en etiquetar este registro!
|