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Micro-LEGO for MEMS
The recently developed transfer printing-based microassembly called micro-LEGO has been exploited to enable microelectromechanical systems (MEMS) applications which are difficult to achieve using conventional microfabrication. Micro-LEGO involves transfer printing and thermal processing of prefabric...
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| Veröffentlicht in: | Micromachines (Basel) |
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| 1. Verfasser: | |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI
2019
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6523840/ https://ncbi.nlm.nih.gov/pubmed/31010089 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10040267 |
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