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Measuring Micro-Friction Torque in MEMS Gas Bearings
An in situ measurement of micro-friction torque in MEMS gas bearings, which has been a challenging research topic for years, is realized by a system designed in this paper. In the system, a high accuracy micro-force sensor and an electronically-driven table are designed, fabricated and utilized. Wit...
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| Publicado no: | Sensors (Basel) |
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| Main Authors: | , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2016
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4883417/ https://ncbi.nlm.nih.gov/pubmed/27213377 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s16050726 |
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