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Research on the Disc Sensitive Structure of a Micro Optoelectromechanical System (MOEMS) Resonator Gyroscope

A micro optoelectromechanical system (MOEMS) resonator gyroscope based on a waveguide micro-ring resonator was proposed. This sensor was operated by measuring the shift of the transmission spectrum. Modal analysis was carried out for the disc sensitive structure of the MOEMS resonator gyroscope (MOE...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Veröffentlicht in:Micromachines (Basel)
Hauptverfasser: Shen, Xiang, Zhao, Liye, Xia, Dunzhu
Format: Artigo
Sprache:Inglês
Veröffentlicht: MDPI 2019
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC6523694/
https://ncbi.nlm.nih.gov/pubmed/31010214
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10040264
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