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Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator
In this paper, the characterization of a whispering gallery mode (WGM) resonator applied in a novel micro-opto-electro-mechanical system (MOEMS) gyroscope was investigated. The WGM optical transmission coupling model was analyzed and compared by adjusting key parameters, such as the cavity radius, t...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7767161/ https://ncbi.nlm.nih.gov/pubmed/33352871 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20247264 |
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