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Research on the Disc Sensitive Structure of a Micro Optoelectromechanical System (MOEMS) Resonator Gyroscope

A micro optoelectromechanical system (MOEMS) resonator gyroscope based on a waveguide micro-ring resonator was proposed. This sensor was operated by measuring the shift of the transmission spectrum. Modal analysis was carried out for the disc sensitive structure of the MOEMS resonator gyroscope (MOE...

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Bibliographic Details
Published in:Micromachines (Basel)
Main Authors: Shen, Xiang, Zhao, Liye, Xia, Dunzhu
Format: Artigo
Language:Inglês
Published: MDPI 2019
Subjects:
Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC6523694/
https://ncbi.nlm.nih.gov/pubmed/31010214
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10040264
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