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A Capacitive Micromachined Ultrasonic Transducer-Based Resonant Sensor Array for Portable Volatile Organic Compound Detection with Wireless Systems

The development of portable volatile organic compound (VOC) sensors is essential for home healthcare and workplace safety because VOCs are environmental pollutants that may critically affect human health. Here, we report a compact and portable sensor platform based on a capacitive micromachined ultr...

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Detalles Bibliográficos
Publicado en:Sensors (Basel)
Main Authors: Yoon, Inug, Eom, Gayoung, Lee, Sungwoo, Kim, Bo Kyeong, Kim, Sang Kyung, Lee, Hyunjoo J.
Formato: Artigo
Idioma:Inglês
Publicado: MDPI 2019
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Acceso en liña:https://ncbi.nlm.nih.gov/pmc/articles/PMC6470568/
https://ncbi.nlm.nih.gov/pubmed/30901963
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19061401
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