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A Capacitive Micromachined Ultrasonic Transducer-Based Resonant Sensor Array for Portable Volatile Organic Compound Detection with Wireless Systems

The development of portable volatile organic compound (VOC) sensors is essential for home healthcare and workplace safety because VOCs are environmental pollutants that may critically affect human health. Here, we report a compact and portable sensor platform based on a capacitive micromachined ultr...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Veröffentlicht in:Sensors (Basel)
Hauptverfasser: Yoon, Inug, Eom, Gayoung, Lee, Sungwoo, Kim, Bo Kyeong, Kim, Sang Kyung, Lee, Hyunjoo J.
Format: Artigo
Sprache:Inglês
Veröffentlicht: MDPI 2019
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC6470568/
https://ncbi.nlm.nih.gov/pubmed/30901963
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19061401
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