Načítá se...
Electron-beam lithography for polymer bioMEMS with submicron features
We present a method for submicron fabrication of flexible, thin-film structures fully encapsulated in biocompatible polymer poly(chloro-p-xylylene) (Parylene C) that improves feature size and resolution by an order of magnitude compared with prior work. We achieved critical dimensions as small as 25...
Uloženo v:
| Vydáno v: | Microsyst Nanoeng |
|---|---|
| Hlavní autoři: | , |
| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
Nature Publishing Group
2016
|
| Témata: | |
| On-line přístup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6444738/ https://ncbi.nlm.nih.gov/pubmed/31057839 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/micronano.2016.53 |
| Tagy: |
Přidat tag
Žádné tagy, Buďte první, kdo otaguje tento záznam!
|