APA Citation

Scholten, K., & Meng, E. (2016). Electron-beam lithography for polymer bioMEMS with submicron features. Microsyst Nanoeng.

Chicago Style Citation

Scholten, Kee, and Ellis Meng. "Electron-beam Lithography for Polymer BioMEMS With Submicron Features." Microsyst Nanoeng 2016.

MLA Citation

Scholten, Kee, and Ellis Meng. "Electron-beam Lithography for Polymer BioMEMS With Submicron Features." Microsyst Nanoeng 2016.

Warning: These citations may not always be 100% accurate.