Scholten, K., & Meng, E. (2016). Electron-beam lithography for polymer bioMEMS with submicron features. Microsyst Nanoeng.
Citação norma ChicagoScholten, Kee, and Ellis Meng. "Electron-beam Lithography for Polymer BioMEMS With Submicron Features." Microsyst Nanoeng 2016.
MLA citiranjeScholten, Kee, and Ellis Meng. "Electron-beam Lithography for Polymer BioMEMS With Submicron Features." Microsyst Nanoeng 2016.
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