Scholten, K., & Meng, E. (2016). Electron-beam lithography for polymer bioMEMS with submicron features. Microsyst Nanoeng.
Chicago Style CitationScholten, Kee, and Ellis Meng. "Electron-beam Lithography for Polymer BioMEMS With Submicron Features." Microsyst Nanoeng 2016.
MLA CitationScholten, Kee, and Ellis Meng. "Electron-beam Lithography for Polymer BioMEMS With Submicron Features." Microsyst Nanoeng 2016.
Warning: These citations may not always be 100% accurate.