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An Optical Diffuse Reflectance Model for the Characterization of a Si Wafer with an Evaporated SiO(2) Layer

Thin films are a type of coating that have a very wide spectrum of applications. They may be used as single layers or composed in multilayer stacks, which significantly extend their applications. One of the most commonly used material for thin films is silicon dioxide, SiO(2). Although there are oth...

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Detalhes bibliográficos
Publicado no:Sensors (Basel)
Main Authors: Zarzycki, Artur, Galeano, July, Bargiel, Sylwester, Andrieux, Aurore, Gorecki, Christophe
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2019
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6412209/
https://ncbi.nlm.nih.gov/pubmed/30795504
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19040892
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