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Technological Platform for Vertical Multi-Wafer Integration of Microscanners and Micro-Optical Components
We describe an original integration technological platform for the miniaturization of micromachined on-chip optical microscopes, such as the laser scanning confocal microscope. The platform employs the multi-wafer vertical integration approach, combined with integrated glass-based micro-optics as we...
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| Publicado no: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2019
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6471930/ https://ncbi.nlm.nih.gov/pubmed/30871213 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10030185 |
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