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InGaAs FinFETs Directly Integrated on Silicon by Selective Growth in Oxide Cavities

III-V semiconductors are being considered as promising candidates to replace silicon channel for low-power logic and RF applications in advanced technology nodes. InGaAs is particularly suitable as the channel material in n-type metal-oxide-semiconductor field-effect transistors (MOSFETs), due to it...

詳細記述

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書誌詳細
出版年:Materials (Basel)
主要な著者: Convertino, Clarissa, Zota, Cezar, Schmid, Heinz, Caimi, Daniele, Sousa, Marilyne, Moselund, Kirsten, Czornomaz, Lukas
フォーマット: Artigo
言語:Inglês
出版事項: MDPI 2018
主題:
オンライン・アクセス:https://ncbi.nlm.nih.gov/pmc/articles/PMC6337424/
https://ncbi.nlm.nih.gov/pubmed/30591676
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma12010087
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