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Monolithic Multi Degree of Freedom (MDoF) Capacitive MEMS Accelerometers
With the continuous advancements in microelectromechanical systems (MEMS) fabrication technology, inertial sensors like accelerometers and gyroscopes can be designed and manufactured with smaller footprint and lower power consumption. In the literature, there are several reported accelerometer desig...
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| Veröffentlicht in: | Micromachines (Basel) |
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| Hauptverfasser: | , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI
2018
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6266379/ https://ncbi.nlm.nih.gov/pubmed/30453536 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9110602 |
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