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Design of capacitive MEMS transverse-comb accelerometers with test hardware
This paper proposes the design of MEMS accelerometers, which include hardware to perform testing in a relatively simple way, with different manufacturing processes, PolyMUMPsTM and SUMMiT VTM of MEMSCAP and Sandia Labs respectively, using a methodology that allows them to be adapted to any of these...
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| Publicado no: | Superficies y vacío |
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| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
2013
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| Assuntos: | |
| Acesso em linha: | https://www.redalyc.org/articulo.oa?id=94227470002 |
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