Design of capacitive MEMS transverse-comb accelerometers with test hardware

This paper proposes the design of MEMS accelerometers, which include hardware to perform testing in a relatively simple way, with different manufacturing processes, PolyMUMPsTM and SUMMiT VTM of MEMSCAP and Sandia Labs respectively, using a methodology that allows them to be adapted to any of these...

Descripció completa

Guardat en:
Dades bibliogràfiques
Publicat a:Superficies y vacío
Autors principals: F. J. Ibarra-Villegas, S. Ortega-Cisneros, F. Sandoval-Ibarra, J. J. Raygoza-Panduro, J. Rivera-Domínguez
Format: Artigo
Idioma:Inglês
Publicat: Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. 2013
Matèries:
Física, Astronomía y Matemáticas
Micro
capacitive
accelerometer
transverse comb
electromechanical systems (MEMS)
Accés en línia:https://www.redalyc.org/articulo.oa?id=94227470002
Etiquetes: Afegir etiqueta
Sense etiquetes, Sigues el primer a etiquetar aquest registre!

Ítems similars