Design of capacitive MEMS transverse-comb accelerometers with test hardware

This paper proposes the design of MEMS accelerometers, which include hardware to perform testing in a relatively simple way, with different manufacturing processes, PolyMUMPsTM and SUMMiT VTM of MEMSCAP and Sandia Labs respectively, using a methodology that allows them to be adapted to any of these...

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Bibliographic Details
Published in:Superficies y vacío
Main Authors: F. J. Ibarra-Villegas, S. Ortega-Cisneros, F. Sandoval-Ibarra, J. J. Raygoza-Panduro, J. Rivera-Domínguez
Format: Artigo
Language:Inglês
Published: Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. 2013
Subjects:
Física, Astronomía y Matemáticas
Micro
capacitive
accelerometer
transverse comb
electromechanical systems (MEMS)
Online Access:https://www.redalyc.org/articulo.oa?id=94227470002
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