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Piezoresistive temperature sensors fabricated by a surface micromachining CMOS MEMS process
This paper presents a micromachined monocrystalline silicon piezoresistive temperature sensor fabricated by a surface micromachining CMOS (Complementary Metal Oxide Semiconductor) MEMS (Micro-Electro-Mechanical System) process. The design of the temperature sensor is based on the structure of the mu...
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| Publicat a: | Sci Rep |
|---|---|
| Autors principals: | , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
Nature Publishing Group UK
2018
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6244008/ https://ncbi.nlm.nih.gov/pubmed/30459315 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-018-35113-z |
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