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Piezoresistive temperature sensors fabricated by a surface micromachining CMOS MEMS process

This paper presents a micromachined monocrystalline silicon piezoresistive temperature sensor fabricated by a surface micromachining CMOS (Complementary Metal Oxide Semiconductor) MEMS (Micro-Electro-Mechanical System) process. The design of the temperature sensor is based on the structure of the mu...

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Bibliografski detalji
Izdano u:Sci Rep
Glavni autori: Cai, Chunhua, Tan, Junyan, Hua, Di, Qin, Ming, Zhu, Nianfang
Format: Artigo
Jezik:Inglês
Izdano: Nature Publishing Group UK 2018
Teme:
Online pristup:https://ncbi.nlm.nih.gov/pmc/articles/PMC6244008/
https://ncbi.nlm.nih.gov/pubmed/30459315
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-018-35113-z
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