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Three-Dimensional Electrochemical Axial Lithography on Si Micro- and Nanowire Arrays
[Image: see text] A templated electrochemical technique for patterning macroscopic arrays of single-crystalline Si micro- and nanowires with feature dimensions down to 5 nm is reported. This technique, termed three-dimensional electrochemical axial lithography (3DEAL), allows the design and parallel...
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| Publicado no: | Nano Lett |
|---|---|
| Main Authors: | , , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
American Chemical Society
2018
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| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6238956/ https://ncbi.nlm.nih.gov/pubmed/30359028 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acs.nanolett.8b03608 |
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