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On-Demand Fabrication of Si/SiO(2) Nanowire Arrays by Nanosphere Lithography and Subsequent Thermal Oxidation
We demonstrate the fabrication of the large-area arrays of vertically aligned Si/SiO(2) nanowires with full tunability of the geometry of the single nanowires by the metal-assisted chemical etching technique and the following thermal oxidation process. To fabricate the geometry controllable Si/SiO(2...
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| Publicado no: | Nanoscale Res Lett |
|---|---|
| Main Authors: | , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer US
2017
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5307406/ https://ncbi.nlm.nih.gov/pubmed/28209026 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-017-1883-5 |
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