Fabrication of parabolic Si nanostructures by nanosphere lithography and its application for solar cells

We demonstrated fabrication of a parabola shaped Si nanostructures of various periods by combined approach of nanosphere lithography and a single step CF(4)/O(2) reactive ion etch (RIE) process. Silica nanosphere monolayers in a hexagonal array were well deposited by a solvent controlled spin coatin...

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Détails bibliographiques
Publié dans:Sci Rep
Auteurs principaux: Cheon, See-Eun, Lee, Hyeon-seung, Choi, Jihye, Jeong, Ah Reum, Lee, Taek Sung, Jeong, Doo Seok, Lee, Kyeong-Seok, Lee, Wook-Seong, Kim, Won Mok, Lee, Heon, Kim, Inho
Format: Artigo
Langue:Inglês
Publié: Nature Publishing Group UK 2017
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Article
Accès en ligne:https://ncbi.nlm.nih.gov/pmc/articles/PMC5544770/
https://ncbi.nlm.nih.gov/pubmed/28779077
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-017-07463-7
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