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Fabrication of parabolic Si nanostructures by nanosphere lithography and its application for solar cells
We demonstrated fabrication of a parabola shaped Si nanostructures of various periods by combined approach of nanosphere lithography and a single step CF(4)/O(2) reactive ion etch (RIE) process. Silica nanosphere monolayers in a hexagonal array were well deposited by a solvent controlled spin coatin...
Αποθηκεύτηκε σε:
| Τόπος έκδοσης: | Sci Rep |
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| Κύριοι συγγραφείς: | , , , , , , , , , , |
| Μορφή: | Artigo |
| Γλώσσα: | Inglês |
| Έκδοση: |
Nature Publishing Group UK
2017
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| Θέματα: | |
| Διαθέσιμο Online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5544770/ https://ncbi.nlm.nih.gov/pubmed/28779077 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-017-07463-7 |
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