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Fabrication of parabolic Si nanostructures by nanosphere lithography and its application for solar cells
We demonstrated fabrication of a parabola shaped Si nanostructures of various periods by combined approach of nanosphere lithography and a single step CF(4)/O(2) reactive ion etch (RIE) process. Silica nanosphere monolayers in a hexagonal array were well deposited by a solvent controlled spin coatin...
Zapisane w:
| Wydane w: | Sci Rep |
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| Główni autorzy: | , , , , , , , , , , |
| Format: | Artigo |
| Język: | Inglês |
| Wydane: |
Nature Publishing Group UK
2017
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| Hasła przedmiotowe: | |
| Dostęp online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5544770/ https://ncbi.nlm.nih.gov/pubmed/28779077 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-017-07463-7 |
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