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Z-Axis Micromachined Tuning Fork Gyroscope with Low Air Damping
This paper reports on the design and fabrication of a z-axis tuning fork gyroscope which has a freestanding architecture. In order to improve the performance of the tuning fork gyroscope by eliminating the influence of the squeeze-film air damping, the driving and sensing parts of the gyroscope were...
Gorde:
| Argitaratua izan da: | Micromachines (Basel) |
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| Egile Nagusiak: | , , , , |
| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
MDPI
2017
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| Gaiak: | |
| Sarrera elektronikoa: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6190345/ https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi8020042 |
| Etiketak: |
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