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A Multi-Fork Z-Axis Quartz Micromachined Gyroscope
A novel multi-fork z-axis gyroscope is presented in this paper. Different from traditional quartz gyroscopes, the lateral electrodes of the sense beam can be arranged in simple patterns; as a result, the fabrication is simplified. High sensitivity is achieved by the multi-fork design. The working pr...
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| Autori principali: | , , , , , |
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| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI
2013
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3821316/ https://ncbi.nlm.nih.gov/pubmed/24048339 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s130912482 |
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