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An Investigation of Processes for Glass Micromachining
This paper presents processes for glass micromachining, including sandblast, wet etching, reactive ion etching (RIE), and glass reflow techniques. The advantages as well as disadvantages of each method are presented and discussed in light of the experiments. Sandblast and wet etching techniques are...
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| Udgivet i: | Micromachines (Basel) |
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| Main Authors: | , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
MDPI
2016
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6190300/ https://ncbi.nlm.nih.gov/pubmed/30407424 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi7030051 |
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