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An Investigation of Processes for Glass Micromachining

This paper presents processes for glass micromachining, including sandblast, wet etching, reactive ion etching (RIE), and glass reflow techniques. The advantages as well as disadvantages of each method are presented and discussed in light of the experiments. Sandblast and wet etching techniques are...

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Bibliografiske detaljer
Udgivet i:Micromachines (Basel)
Main Authors: Van Toan, Nguyen, Toda, Masaya, Ono, Takahito
Format: Artigo
Sprog:Inglês
Udgivet: MDPI 2016
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC6190300/
https://ncbi.nlm.nih.gov/pubmed/30407424
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi7030051
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