ロード中...
CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology
This work demonstrates the feasibility to obtain copper nanoelectromechanical (NEMS) relays using a commercial complementary metal oxide semiconductor (CMOS) technology (ST 65 nm) following an intra CMOS-MEMS approach. We report experimental demonstration of contact-mode nano-electromechanical switc...
保存先:
| 出版年: | Micromachines (Basel) |
|---|---|
| 主要な著者: | , , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
MDPI
2016
|
| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6190103/ https://ncbi.nlm.nih.gov/pubmed/30407403 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi7020030 |
| タグ: |
タグ追加
タグなし, このレコードへの初めてのタグを付けませんか!
|