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CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology
This work demonstrates the feasibility to obtain copper nanoelectromechanical (NEMS) relays using a commercial complementary metal oxide semiconductor (CMOS) technology (ST 65 nm) following an intra CMOS-MEMS approach. We report experimental demonstration of contact-mode nano-electromechanical switc...
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| Publicat a: | Micromachines (Basel) |
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| Autors principals: | , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI
2016
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6190103/ https://ncbi.nlm.nih.gov/pubmed/30407403 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi7020030 |
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