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Micromachined Resonators: A Review
This paper is a review of the remarkable progress that has been made during the past few decades in design, modeling, and fabrication of micromachined resonators. Although micro-resonators have come a long way since their early days of development, they are yet to fulfill the rightful vision of thei...
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| 出版年: | Micromachines (Basel) |
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| 主要な著者: | , , , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
MDPI
2016
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6190074/ https://ncbi.nlm.nih.gov/pubmed/30404333 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi7090160 |
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