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A Nonlinear Rate Microsensor utilising Internal Resonance

Micro- and nano-resonators have been studied extensively both for the scientific viewpoint to understand basic interactions at small scales as well as for applied research to build sensors and mechanical signal processors. Majority of the resonant microsystems, particularly those manufactured at a l...

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Detalhes bibliográficos
Publicado no:Sci Rep
Main Authors: Sarrafan, Atabak, Azimi, Soheil, Golnaraghi, Farid, Bahreyni, Behraad
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group UK 2019
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6572818/
https://ncbi.nlm.nih.gov/pubmed/31209227
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-019-44669-3
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