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Design and Analysis of a New Tuning Fork Structure for Resonant Pressure Sensor

This paper presents a micromachined resonant pressure sensor. The sensor is designed to optimize the sensitivity and reduce the cross-talk between the driving electrodes and sensing electrodes. The relationship between the sensitivity of the sensor and the main design parameters is analyzed both the...

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Bibliografische gegevens
Gepubliceerd in:Micromachines (Basel)
Hoofdauteurs: Sun, Xiaodong, Yuan, Weizheng, Qiao, Dayong, Sun, Ming, Ren, Sen
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: MDPI 2016
Onderwerpen:
Online toegang:https://ncbi.nlm.nih.gov/pmc/articles/PMC6189765/
https://ncbi.nlm.nih.gov/pubmed/30404322
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi7090148
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