Načítá se...
Design and Analysis of a New Tuning Fork Structure for Resonant Pressure Sensor
This paper presents a micromachined resonant pressure sensor. The sensor is designed to optimize the sensitivity and reduce the cross-talk between the driving electrodes and sensing electrodes. The relationship between the sensitivity of the sensor and the main design parameters is analyzed both the...
Uloženo v:
| Vydáno v: | Micromachines (Basel) |
|---|---|
| Hlavní autoři: | , , , , |
| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
MDPI
2016
|
| Témata: | |
| On-line přístup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6189765/ https://ncbi.nlm.nih.gov/pubmed/30404322 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi7090148 |
| Tagy: |
Přidat tag
Žádné tagy, Buďte první, kdo otaguje tento záznam!
|