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Design, Fabrication, and Performance Characterization of LTCC-Based Capacitive Accelerometers
In this paper, two versions of capacitive accelerometers based on low-temperature co-fired ceramic (LTCC) technology are developed, different with respect to the detection technique, as well as the mechanical structure. Fabrication of the key structure, a heavy proof mass with thin beams embedded in...
שמור ב:
| הוצא לאור ב: | Micromachines (Basel) |
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| Main Authors: | , , , , , , , |
| פורמט: | Artigo |
| שפה: | Inglês |
| יצא לאור: |
MDPI
2018
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| נושאים: | |
| גישה מקוונת: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6187678/ https://ncbi.nlm.nih.gov/pubmed/30424054 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9030120 |
| תגים: |
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