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Integrated Electromechanical Transduction Schemes for Polymer MEMS Sensors
Polymer Micro ElectroMechanical Systems (MEMS) have the potential to constitute a powerful alternative to silicon-based MEMS devices for sensing applications. Although the use of commercial photoresists as structural material in polymer MEMS has been widely reported, the integration of functional po...
Gardado en:
| Publicado en: | Micromachines (Basel) |
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| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI
2018
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6187334/ https://ncbi.nlm.nih.gov/pubmed/30424130 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9050197 |
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