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Integrated Electromechanical Transduction Schemes for Polymer MEMS Sensors

Polymer Micro ElectroMechanical Systems (MEMS) have the potential to constitute a powerful alternative to silicon-based MEMS devices for sensing applications. Although the use of commercial photoresists as structural material in polymer MEMS has been widely reported, the integration of functional po...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Thuau, Damien, Ducrot, Pierre-Henri, Poulin, Philippe, Dufour, Isabelle, Ayela, Cédric
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2018
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6187334/
https://ncbi.nlm.nih.gov/pubmed/30424130
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9050197
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