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Engineering polymer MEMS using combined microfluidic pervaporation and micro-molding

In view of the extensive increase of flexible devices and wearable electronics, the development of polymer micro-electro-mechanical systems (MEMS) is becoming more and more important since their potential to meet the multiple needs for sensing applications in flexible electronics is now clearly esta...

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Vydáno v:Microsyst Nanoeng
Hlavní autoři: Thuau, Damien, Laval, Cédric, Dufour, Isabelle, Poulin, Philippe, Ayela, Cédric, Salmon, Jean-Baptiste
Médium: Artigo
Jazyk:Inglês
Vydáno: Nature Publishing Group UK 2018
Témata:
On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC6220165/
https://ncbi.nlm.nih.gov/pubmed/31057903
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41378-018-0017-2
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