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Graphene-Based Nanoscale Vacuum Channel Transistor

We report the fabrication and electrical performance of nanoscale vacuum channel transistor (NVCT) based on graphene. Ninety-nanometer-width vacuum nano-channel could be precisely fabricated with standard electron beam lithography process. The optimization and treatment of surface damage and adhesiv...

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Bibliografiske detaljer
Udgivet i:Nanoscale Res Lett
Main Authors: Xu, Ji, Gu, Zhuyan, Yang, Wenxin, Wang, Qilong, Zhang, Xiaobing
Format: Artigo
Sprog:Inglês
Udgivet: Springer US 2018
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Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC6172161/
https://ncbi.nlm.nih.gov/pubmed/30288627
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-018-2736-6
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