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Graphene-Based Nanoscale Vacuum Channel Transistor
We report the fabrication and electrical performance of nanoscale vacuum channel transistor (NVCT) based on graphene. Ninety-nanometer-width vacuum nano-channel could be precisely fabricated with standard electron beam lithography process. The optimization and treatment of surface damage and adhesiv...
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Publicado no: | Nanoscale Res Lett |
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Main Authors: | , , , , |
Formato: | Artigo |
Idioma: | Inglês |
Publicado em: |
Springer US
2018
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Assuntos: | |
Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6172161/ https://ncbi.nlm.nih.gov/pubmed/30288627 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-018-2736-6 |
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