3D Nanofabrication of High‐Resolution Multilayer Fresnel Zone Plates

Focusing X‐rays to single nanometer dimensions is impeded by the lack of high‐quality, high‐resolution optics. Challenges in fabricating high aspect ratio 3D nanostructures limit the quality and the resolution. Multilayer zone plates target this challenge by offering virtually unlimited and freely s...

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Bibliografiske detaljer
Udgivet i:Adv Sci (Weinh)
Main Authors: Sanli, Umut Tunca, Jiao, Chengge, Baluktsian, Margarita, Grévent, Corinne, Hahn, Kersten, Wang, Yi, Srot, Vesna, Richter, Gunther, Bykova, Iuliia, Weigand, Markus, Schütz, Gisela, Keskinbora, Kahraman
Format: Artigo
Sprog:Inglês
Udgivet: John Wiley and Sons Inc. 2018
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Full Papers
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC6145245/
https://ncbi.nlm.nih.gov/pubmed/30250789
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1002/advs.201800346
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