3D Nanofabrication of High‐Resolution Multilayer Fresnel Zone Plates

Focusing X‐rays to single nanometer dimensions is impeded by the lack of high‐quality, high‐resolution optics. Challenges in fabricating high aspect ratio 3D nanostructures limit the quality and the resolution. Multilayer zone plates target this challenge by offering virtually unlimited and freely s...

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Vydáno v:Adv Sci (Weinh)
Hlavní autoři: Sanli, Umut Tunca, Jiao, Chengge, Baluktsian, Margarita, Grévent, Corinne, Hahn, Kersten, Wang, Yi, Srot, Vesna, Richter, Gunther, Bykova, Iuliia, Weigand, Markus, Schütz, Gisela, Keskinbora, Kahraman
Médium: Artigo
Jazyk:Inglês
Vydáno: John Wiley and Sons Inc. 2018
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On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC6145245/
https://ncbi.nlm.nih.gov/pubmed/30250789
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1002/advs.201800346
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