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Electron heating in rf capacitive discharges at atmospheric-to-subatmospheric pressures

Electron heating is a fundamental and multidisciplinary phenomenon in partially ionized gases, from the planet’s ionosphere to laboratory-scale plasmas. Plasmas produced at ambient or reduced pressures have recently shown potential for scientific and industrial applications. However, electron heatin...

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Detalhes bibliográficos
Publicado no:Sci Rep
Main Authors: Park, Sanghoo, Choe, Wonho, Kim, Holak
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group UK 2018
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6033924/
https://ncbi.nlm.nih.gov/pubmed/29976980
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-018-27945-6
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